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MEMS Reliability. 2011 ed.
・ISBN 978-1-4614-2736-0 paper EUR 114.99
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| 著者・編者 | Hartzell, Allyson L. / da Silva, Mark G. / Shea, Herbert R., |
|---|---|
| シリーズ | (MEMS Reference Shelf) |
| 出版社 | (Springer-Verlag New York Inc., US) |
| 出版年月 | 2012 |
| ページ数 | 291 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A05-46055＞ |
解説
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.
MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.