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Strain Effect in Semiconductors: Theory and Device Applications. 2010 ed.
・ISBN 978-1-4419-0551-2 hard EUR 149.99
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★★★
| 著者・編者 | Sun, Yongke / Thompson, Scott E. / Nishida, Toshikazu, |
|---|---|
| 出版社 | (Springer-Verlag New York Inc., US) |
| 出版年月 | 2009 |
| ページ数 | 350 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A05-44260＞ |
解説
Strain Effect in Semiconductors: Theory and Device Applications presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers. Discusses relevant applications of strain while also focusing on the fundamental physics pertaining to bulk, planar, and scaled nano-devices. Hence, this book is relevant for current strained Si logic technology as well as for understanding the physics and scaling for future strained nano-scale devices.