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Dynamics of Microelectromechanical Systems. 2007 ed.
・ISBN 978-0-387-36800-9 hard EUR 49.99
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| 著者・編者 | Lobontiu, Nicolae, |
|---|---|
| シリーズ | (Microsystems) |
| 出版社 | (Springer-Verlag New York Inc., US) |
| 出版年月 | 2007 |
| ページ数 | 403 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A05-43667＞ |
解説
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
- An in-depth treatment of problems that involve reliable modeling, analysis and design,
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- Analytical models with correct dependences on service dimensions,
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- Cantilever based systems for nanofabrication researchers and designers, and
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- Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.