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MEMS Materials and Processes Handbook. 2011
・ISBN 978-0-387-47316-1 hard EUR 299.00
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| 著者・編者 | Ghodssi, Reza / Lin, Pinyen (eds.), |
|---|---|
| シリーズ | (MEMS Reference Shelf) |
| 出版社 | (Springer-Verlag New York Inc., US) |
| 出版年月 | 2011 |
| ページ数 | 1188 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A05-41779＞ |
解説
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.