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商品詳細
Nanopositioning Technologies: Fundamentals and Applications. 1st ed. 2016
・ISBN 978-3-319-23852-4 hard EUR 99.99
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お気に入り
★★★
| 著者・編者 | Ru, Changhai / Liu, Xinyu / Sun, Yu (eds.), |
|---|---|
| 出版社 | (Springer International Publishing AG, SZ) |
| 出版年月 | 2016 |
| ページ数 | 409 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A05-9822＞ |
解説
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.