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Micro-Fluidic and Micro-electromechanical System Applications: Subtractive Processing of Glass Substrates.
・ISBN 978-1-032-74779-8 hard GB£ 145.99
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| 著者・編者 | Van Toan, Nguyen / Singh, Tarlochan (eds.), |
|---|---|
| 出版社 | (CRC Press, UK) |
| 出版年月 | 2026 |
| ページ数 | 286 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A04-95254＞ |
解説
The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and characterization of through-glass via for micro-electromechanical system packaging applications.
This book:
- Presents an overview of subtractive technologies needed to process glass materials for micro-fluidic, and micro-electromechanical system applications
- Discusses the latest developments in advanced machining techniques based on mechanical energy, chemical energy, plasma energy, and high-temperature methods
- Covers post-processing techniques employed to facilitate the machined glass substrates for the micro-electromechanical system, micro-fluidic, and lab-on-chip applications
- Explains advanced techniques such as nonconventional machining processes, hybrid, and sequential machining methods to process glass
- Illustrates topics such as photoacoustic biosensing, cantilever beam temperature sensor, and parametric effect on machined micro-channels
It is primarily written for senior undergraduates, graduate students, and academic researchers in the fields of manufacturing engineering, industrial engineering, mechanical engineering, production engineering, materials science, and engineering.