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Theory and Application of Laser Chemical Vapor Deposition. Softcover reprint of the original 1st ed. 1995
・ISBN 978-1-4899-1432-3 paper EUR 149.99
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| 著者・編者 | Mazumder, J. / Kar, Aravinda, |
|---|---|
| シリーズ | (Lasers, Photonics, and Electro-Optics) |
| 出版社 | (Springer-Verlag New York Inc., US) |
| 出版年月 | 2013 |
| ページ数 | 396 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A04-77439＞ |
解説
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.