株式会社極東書店トップ > 商品一覧 > Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals. 2021 ed.
商品詳細
Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals. 2021 ed.
・ISBN 978-3-030-63825-2 hard EUR 99.99
¥26,726.- (税込) ※(※)価格はご注文時の参考価格となります。
納品価格につきましては書籍の入荷時点で確定となります。
版元の原価改定、外国為替の変動等により異なる場合がございますので、予めご了承下さい。
| 著者・編者 | Montero Alvarez, Daniel, |
|---|---|
| シリーズ | (Springer Theses) |
| 出版社 | (Springer Nature Switzerland AG, SZ) |
| 出版年月 | 2021 |
| ページ数 | 230 pp. |
| 言語 | ENG |
| ニュース番号 | <A02-86773> |
解説
This thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors.