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This book presents a concept for fostering resource efficient manufacturing. The protection of our environment demands a more responsible use of natural resources, and a higher degree of transparency along manufacturing value chains will be required in order to make significant advances in this context. Industrial decision makers must be provided with adequate methods and tools to simultaneously and systematically pursue technical, economic and environmental targets. Building on established and complementary methods, such as material and energy flow analysis (MEFA), value stream mapping (VSM), life cycle costing (LCC) and environmental life cycle assessment (LCA), this book introduces a concept that allows a holistic modeling and multi-dimensional performance assessment of manufacturing systems on different levels - from processes up to entire value chains and product life cycles. It also demonstrates the application of the concept using two case studies from the metal mechanic industry.