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商品詳細
Flash Lamp Annealing: From Basics to Applications. 2019 ed.
・ISBN 978-3-030-23298-6 hard EUR 129.99
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| 著者・編者 | Rebohle, Lars / Prucnal, Slawomir / Reichel, Denise, |
|---|---|
| シリーズ | (Springer Series in Materials Science) |
| 出版社 | (Springer Nature Switzerland AG, SZ) |
| 出版年月 | 2019 |
| ページ数 | 288 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A02-53317＞ |
解説
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.