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商品詳細
Scanning Probe Lithography: Fundamentals, Materials, and Applications.
・ISBN 978-1-032-12214-4 hard GB£ 124.99
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| 著者・編者 | Ryu, Yu Kyoung / Rodrigo, Javier Martinez, |
|---|---|
| シリーズ | (Emerging Materials and Technologies) |
| 出版社 | (CRC Press, UK) |
| 出版年月 | 2022 |
| ページ数 | 128 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A01-46381＞ |
解説
The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.
* Introduces historical background of SPL, including evolution of the technique and tools
* Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied
* Shows the different types of devices and structures fabricated by SPL, together with the processing steps
* Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups
* Summarizes strengths, limitations, and potential of SPL
This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.