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商品詳細
Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma.
・ISBN 978-0-367-88626-4 paper GB£ 98.99
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| 著者・編者 | Kazanskiy, Nikolay L. / Kolpakov, Vsevolod A., |
|---|---|
| 出版社 | (CRC Press, UK) |
| 出版年月 | 2019 |
| ページ数 | 211 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A00-39708＞ |
解説
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.