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Handbook of Silicon Semiconductor Metrology.
・ISBN 978-0-8247-0506-0 hard GB£ 520.00
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| 著者・編者 | Diebold, Alain C. (ed.), |
|---|---|
| 出版社 | (CRC Press Inc, US) |
| 出版年月 | 2001 |
| ページ数 | 894 pp. |
| 言語 | ENG |
| ニュース番号 | ＜A00-35168＞ |
解説
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.