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Handbook of Semiconductor Manufacturing Technology. 2nd edition

Handbook of Semiconductor Manufacturing Technology. 2nd edition

・ISBN 978-1-57444-675-3 hard GB£ 235.00

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お気に入り
電子版あり 大学・学術機関向け電子ブック(eBook)ISBN 9781315213934
著者・編者Nishi, Yoshio / Doering, Robert (eds.),
出版社 (CRC Press Inc, US)
出版年月2007
ページ数1720 pp.
言語ENG
ニュース番号<A00-23825>

解説

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available.

Stay Current with the Latest Technologies
In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on...

  • Silicon-on-insulator (SOI) materials and devices
  • Supercritical CO2 in semiconductor cleaning
  • Low-? dielectrics
  • Atomic-layer deposition
  • Damascene copper electroplating
  • Effects of terrestrial radiation on integrated circuits (ICs)

    Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication.

    While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.